Measurement Technique |
Stylus profilometry (contact measurement) |
Measurement Capability |
Two-dimensional surface profile measurements; Optional three-dimensional measurement / analyses |
Sample Viewing |
1 to 15 mg with LIS 3 sensor |
Stylus Force |
1 to 15 mg with LIS 3 sensor |
Low Force Option |
N-Lite+ Low Force with 0.03 to 15 mg |
Stylus Options |
Stylus radius options from 50nm to 25_m; High Aspect Ratio (HAR) tips 10_m x 2_m and 200_m x 20_m;
Custom tips available upon request |
Sample X/Y Stage |
Manual 100 mm (4 in.) X/Y, manual leveling; Motorized 150 mm (6 in.) X/Y,
Manual leveling |
Sample R-Theta Stage |
Manual, continuous 360 degrees;
Motorized, continuous 360 degrees |
Computer System |
64-bit multi-core parallel processor,
Windows® 7.0; Optional 23in. flat panel display |
Software |
Vision64 Operation and Analysis Software; Stress Measurement; Cantilever Deflection; Stitching;
3D Stress; 3D Mapping |
Scan Length Range |
55 mm (2in.) |
Data Points Per Scan |
120,000 maximum |
Max. Wafer Size |
200 mm (8in.) |
Step Height Repeatability |
<5A, 1sigma on 1um step |
Vertical Range |
1 mm (0.039in.) |
System Dimensions and
Weight |
455 mm W x 550 mm D x 370 mm H (17.9in. W x 22.6in. D x 14.5in. H);
34 kg (75 lbs.);
Enclosure: 550 mm L x 585 mm W x 445 mm H (21.6in. L x 23in. W x 17.5in. H); 21.7 kg (48 lbs.) |
